Structural and optical characterization of low-temperature ALD crystalline AlN
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference95 articles.
1. Group III-nitride lasers: a materials perspective;Hardy;Mater. Today,2011
2. Ultraviolet light-emitting diodes based on group three nitrides;Khan;Nat. Photonics,2008
3. Devices on AlN epitaxial films;Tsubouchi;IEEE Trans. Sonics Ultrason. SU,1985
4. SAW characteristics of AlN films sputtered on silicon substrates;Clement;Ultrasonics,2004
5. Piezoelectric properties of polycrystalline AlN thin films for MEMS application;Tonisch;Sens. Actuators A Phys.,2006
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