Structural and optical properties studies of sputtered a-SiCN thin films
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference7 articles.
1. Synthesis of silicon carbide nitride nanocomposite films by a simple electrochemical method
2. Effect of the deposition conditions on the morphology and bonding structure of SiCN films
3. Microstructure, mechanical properties, and wetting behavior of Si–C–N thin films grown by reactive magnetron sputtering
4. Hard Si–N–C films with a tunable band gap produced by pulsed glow discharge deposition
5. SiCN thin film prepared at room temperature by r.f. reactive sputtering
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2. High performance hierarchical SiCN nanowires for efficient photocatalytic - photoelectrocatalytic and supercapacitor applications;Applied Catalysis B: Environmental;2018-12
3. EPR and Magnetization Studies of Polymer-Derived Fe-Doped SiCN Nanoceramics Annealed at Various Temperatures: Blocking Temperature, Superparamagnetism and Size Distributions;Applied Magnetic Resonance;2018-10-11
4. Influence of carbon on structure stability, mechanical and tribological properties of β-Si3(Cx,N1−x)4 silicon carbonitride;Materials Research Express;2018-05-09
5. Electric field involved transport at elevated temperature in nanocrystalline silicon carbide nitride (nc-SiCN) thin films for harsh environment applications;Current Applied Physics;2018-02
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