A compact soft X-ray microscope using an electrode-less Z-pinch source
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/186/i=1/a=012028/pdf
Reference4 articles.
1. Potential Operating Region for Ultrasoft X-Ray Microscopy of Biological Materials
2. Application of the Energetiq EQ-10 electrodeless Z-Pinch EUV light source in outgassing and exposure of EUV photoresist
3. Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution
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