Instabilities in an inductively coupled oxygen plasma
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference18 articles.
1. An electronegative inductive discharge instability
2. Instabilities in low-pressure inductive discharges with attaching gases
3. Instabilities in low-pressure electronegative inductive discharges
4. Electrical and optical characterisation of capacitively and inductively coupled GEC reference cells
5. Hysteresis and the E-to-H transition in radiofrequency inductive discharges
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