Electrical and optical characterisation of capacitively and inductively coupled GEC reference cells
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
1. Olthoff JK, editor. Gaseous Electronics Conference RF Reference Cell. J Res Natl Stand Technol 1995;100.
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3. An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell
4. Current and Voltage Measurements in the Gaseous Electronics Conference Rf Reference Cell
5. Sheath dynamics observed in a 13.56 MHz-driven plasma
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