III-V semiconductor device dry etching using ECR discharges
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference30 articles.
1. Surface Damage on GaAs Induced by Reactive Ion Etching and Sputter Etching
2. Investigation of reactive ion etching induced damage in GaAs–AlGaAs quantum well structures
3. Electron cyclotron resonance plasma‐induced damage in AlGaAs/GaAs/AlGaAs single quantum wells
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