Fabry–Perot interferometry for measurements of the velocity of sputtered atoms in a magnetron discharge
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Published:2008-08-26
Issue:4
Volume:17
Page:045013
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Britun N,Han J G,Oh S-G
Subject
Condensed Matter Physics
Cited by
19 articles.
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