Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference18 articles.
1. Analytical solution for capacitive RF sheath
2. Dynamics of a collisional, capacitive RF sheath
3. Analytical model of a dual frequency capacitive sheath
4. Modelling of the dual frequency capacitive sheath in the intermediate pressure range
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1. Two-dimensional particle-in-cell simulations of standing waves and wave-induced hysteresis in asymmetric capacitive discharges;Journal of Physics D: Applied Physics;2017-11-14
2. A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge;Physics of Plasmas;2017-08
3. Nonlinear series resonance and standing waves in dual-frequency capacitive discharges;Plasma Sources Science and Technology;2016-11-25
4. Ion energy distribution function measurements by laser-induced fluorescence in a dual radio frequency sheath;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2016-03
5. Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges;Plasma Sources Science and Technology;2015-08-27
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