Modelling of a large scale reactor for plasma deposition of silicon
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference11 articles.
1. A voltage uniformity study in large-area reactors for RF plasma deposition
2. Amorphous silicon deposition: Industrial and technical challenges
3. A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments
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