Lecture notes on radio-frequency discharges, dc potentials, ion and electron energy distributions-Reference-Cited by-同舟云学术

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Lecture notes on radio-frequency discharges, dc potentials, ion and electron energy distributions

Published:2000-10-31 Issue:4 Volume:9 Page:507-516
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Goedheer W J

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference18 articles.

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