On electron energy distribution function measurements in microwave discharges sustained by propagating surface waves
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference32 articles.
1. Electron energy distributions in oxygen microwave plasmas
2. Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements
3. On the influence of Coulomb collisions on the electron energy distribution function of surface wave produced argon plasmas
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