Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/24/i=9/a=010/pdf
Reference24 articles.
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5. Characteristics of high-frequency and direct-current argon discharges at low pressures: a comparative analysis
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