Dust particle coagulation mechanism in low-pressure plasma: rapid growth and saturation stage modeling
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference58 articles.
1. Synthesis of silicon nitride particles in pulsed radio frequency plasmas
2. The production of nanocrystalline powders by magnetron sputtering
3. In situ laser diagnostic studies of plasma‐generated particulate contamination
4. Particle formation rates in sulfur hexafluoride plasma etching of silicon
5. Study of initial dust formation in an Ar‐SiH4discharge by laser induced particle explosive evaporation
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