Spectroscopic and probe measurements of structures in a parallel-plates RF discharge with particles-Reference-Cited by-同舟云学术

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Spectroscopic and probe measurements of structures in a parallel-plates RF discharge with particles

Published:1994-08-01 Issue:3 Volume:3 Page:314-319
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Tachibana K,Hayashi Y,Okuno T,Tatsuta T

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference14 articles.

1. Numerical and experimental diagnostics of rf discharges in pure and dusty argon

2. Characteristics of a dusty nonthermal plasma from a particle-in-cell Monte Carlo simulation

3. Monte Carlo‐fluid hybrid model of the accumulation of dust particles at sheath edges in radio‐frequency discharges

4. A model for particulate contaminated glow discharges

5. Observation of growing kinetics of particles in a helium‐diluted silane rf plasma

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