Numerical and experimental diagnostics of rf discharges in pure and dusty argon-Reference-Cited by-同舟云学术

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Numerical and experimental diagnostics of rf discharges in pure and dusty argon

Published:1992-12-01 Issue:12 Volume:46 Page:7923-7933
ISSN:1050-2947
Container-title:Physical Review A
language:en
Short-container-title:Phys. Rev. A

Author:

Belenguer Ph.,Blondeau J. Ph.,Boufendi L.,Toogood M.,Plain A.,Bouchoule A.,Laure C.,Boeuf J. P.

Publisher

American Physical Society (APS)

Subject

Atomic and Molecular Physics, and Optics

Link

http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.46.7923/fulltext

Reference27 articles.

1. In situ laser diagnostic studies of plasma‐generated particulate contamination

2. Particulate generation in silane/ammonia rf discharges

3. The Quantum Mechanics of Larger Semiconductor Clusters ("Quantum Dots")

4. Nanometer-sized semiconductor clusters: materials synthesis, quantum size effects, and photophysical properties

5. Monte Carlo‐fluid hybrid model of the accumulation of dust particles at sheath edges in radio‐frequency discharges

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