The influence of the EUV spectrum on plasma induced by EUV radiation in argon and hydrogen gas
Author:
Funder
ASML
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference29 articles.
1. Photo-ionized neon plasmas induced by radiation pulses of a laser-plasma EUV source and a free electron laser FLASH
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4. Exploring the temporally resolved electron density evolution in extreme ultra-violet induced plasmas
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