Study of an argon magnetron discharge used for molybdenum sputtering. I. Collisional radiative model-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Study of an argon magnetron discharge used for molybdenum sputtering. I. Collisional radiative model

Published:1993-08-01 Issue:3 Volume:2 Page:127-137
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Guimaraes F,Bretagne J

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference33 articles.

1. Dynamic interactions in the physical properties of magnetron deposition systems

2. The analysis and automatic control of a reactive d.c. magnetron sputtering process

3. Magnetron sputtering: basic physics and application to cylindrical magnetrons

4. Diagnostic methods for sputtering plasmas

Cited by 45 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. On the population density of the argon excited levels in a high power impulse magnetron sputtering discharge;Physics of Plasmas;2022-02

2. On the electron energy distribution function in the high power impulse magnetron sputtering discharge;Plasma Sources Science and Technology;2021-04-01

3. STUDY OF LOW-PRESSURE DISCHARGE BY OPTICAL EMISSION SPECTROSCOPY;Problems of Atomic Science and Technology;2020-12-11

4. Spectroscopic investigation on the near-substrate plasma characteristics of chromium HiPIMS in low density discharge mode;Plasma Sources Science and Technology;2020-01-28

5. Modeling the high power impulse magnetron sputtering discharge;High Power Impulse Magnetron Sputtering;2020

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP