Spatial profiling of H(n= 2) atom number densities in a dc arc jet reactor
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference28 articles.
1. Thin film diamond by chemical vapour deposition methods
2. Measurements of C2 and CH concentrations and temperatures in a dc arc jet using cavity ring-down spectroscopy
3. Cavity ring-down spectroscopy measurements of the concentrations of C2(X1Σg+) radicals in a DC arc jet reactor used for chemical vapour deposition of diamond films
4. Improved characterisation of C2 and CH radical number density distributions in a DC arc jet used for diamond chemical vapour deposition
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Cavity Ring-Down Spectroscopy Measurement of H(n=2) Density in Mesoplasma for Fast-Rate Silicon Epitaxy;Japanese Journal of Applied Physics;2013-07-01
2. Exploring the Plasma Chemistry in Microwave Chemical Vapor Deposition of Diamond from C/H/O Gas Mixtures;The Journal of Physical Chemistry A;2012-09-18
3. Probing the plasma chemistry in a microwave reactor used for diamond chemical vapor deposition by cavity ring down spectroscopy;Journal of Applied Physics;2008-11-15
4. Measurement and modeling of Ar∕H2∕CH4 arc jet discharge chemical vapor deposition reactors II: Modeling of the spatial dependence of expanded plasma parameters and species number densities;Journal of Applied Physics;2007-09-15
5. Measurement and modeling of Ar∕H2∕CH4 arc jet discharge chemical vapor deposition reactors. I. Intercomparison of derived spatial variations of H atom, C2, and CH radical densities;Journal of Applied Physics;2007-09-15
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