Atomic hydrogen determination in medium-pressure microwave discharge hydrogen plasmas via emission actinometry
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference39 articles.
1. Growth of Diamond from Atomic Hydrogen and a Supersonic Free Jet of Methyl Radicals
2. CVD diamond films: from growth to applications
3. Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD
4. Reaction scheme of ammonia synthesis in the ECR plasmas
5. Absolute concentration and loss kinetics of hydrogen atom in methane and hydrogen plasmas
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Controlling the carrier density of surface conductive diamond;Diamond and Related Materials;2022-02
2. Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition;The Journal of Physical Chemistry A;2019-03-11
3. Hydrogen Chemical Configuration and Thermal Stability in Tungsten Disulfide Nanoparticles Exposed to Hydrogen Plasma;The Journal of Physical Chemistry C;2017-05-17
4. Efficiency of silane gas generation in high-rate silicon etching by narrow-gap microwave hydrogen plasma;Journal of Physics D: Applied Physics;2015-12-09
5. Ultra high amorphous silicon passivation quality of crystalline silicon surface using in-situ post-deposition treatments;physica status solidi (RRL) - Rapid Research Letters;2014-12-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3