Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition

Published:2019-03-11 Issue:13 Volume:123 Page:2544-2558
ISSN:1089-5639
Container-title:The Journal of Physical Chemistry A
language:en
Short-container-title:J. Phys. Chem. A

Author:

Mahoney Edward J. D.¹²,Mushtaq Sohail¹,Ashfold Michael N. R.¹^ORCID,Mankelevich Yuri A.³

Affiliation:

1. School of Chemistry, University of Bristol, Bristol BS8 1TS, U.K.

2. Centre for Doctoral Training in Diamond Science and Technology, University of Warwick, Gibbet Hill Road, Coventry CV4 7AL, U.K.

3. Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Leninskie gory, Moscow, 119991, Russia

Funder

Engineering and Physical Sciences Research Council

Element Six

Publisher

American Chemical Society (ACS)

Subject

Physical and Theoretical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.jpca.8b12294

Reference44 articles.

1. Theory of Diamond Chemical Vapor Deposition

2. CVD diamond films: from growth to applications

3. Understanding the chemical vapor deposition of diamond: recent progress

4. Modelling of diamond deposition microwave cavity generated plasmas

5. Effects of noble gases on diamond deposition from methane‐hydrogen microwave plasmas

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