Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference39 articles.
1. Mass and energy resolved detection of ions and neutral sputtered species incident at the substrate during reactive magnetron sputtering of Ti in mixed Ar+N2 mixtures
2. Ionized physical vapor deposition (IPVD): A review of technology and applications
3. Magnetron sputter deposition with high levels of metal ionization
4. Metal ion deposition from ionized mangetron sputtering discharge
Cited by 26 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of bias voltage on the erosion performance of TiAlSiN coatings on TC6 substrate by high power impulse magnetron sputtering;Surface and Coatings Technology;2024-02
2. Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering;Plasma Chemistry and Plasma Processing;2023-11-17
3. HiPIMS induced high-purity Ti3AlC2 MAX phase coating at low-temperature of 700 °C;Journal of the European Ceramic Society;2023-09
4. Ion current density on the substrate during short-pulse HiPIMS;Plasma Sources Science and Technology;2023-07-01
5. Application of positive pulse to extract ions from HiPIMS ionization region;Vacuum;2022-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3