Magnetron sputter deposition with high levels of metal ionization
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110176
Reference9 articles.
1. Angular Distribution of Sputtered Material
2. Quantitative sputtering
3. Directionality of sputtered Cu atoms in a hollow cathode enhanced planar magnetron
4. Collimated magnetron sputter deposition
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