Fluid description of non-local electron kinetics in inductively coupled plasmas-Reference-Cited by-同舟云学术

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Fluid description of non-local electron kinetics in inductively coupled plasmas

Published:2008-04-17 Issue:2 Volume:17 Page:025017
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Hagelaar G J M

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference27 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Overview of the RF source development programme at IPP Garching

3. Electromagnetic field structure in a weakly collisional inductively coupled plasma

4. Negative Power Absorption in Inductively Coupled Plasma

5. Experimental Evidence of Collisionless Power Absorption in Inductively Coupled Plasmas

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1. Three-dimensional modeling of the large and powerful radio frequency negative hydrogen ion source with Faraday shield;Fusion Engineering and Design;2024-07

2. Kinetic simulations of low-pressure inductively coupled plasma: an implicit electromagnetic PIC/MCC model with the ADI-FDTD method;Journal of Physics D: Applied Physics;2024-01-04

3. E–H transitions in Ar/O2 and Ar/Cl2 inductively coupled plasmas: Antenna geometry and operating conditions;Journal of Applied Physics;2023-05-01

4. Modeling inductive radio frequency coupling in powerful negative hydrogen ion sources: validating a self-consistent fluid model;Plasma Sources Science and Technology;2022-03-01

5. Numerical investigation of radio-frequency negative hydrogen ion sources by a three-dimensional fluid model*;Chinese Physics B;2021-09-01

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