Time-resolved electrostatic probe studies of a pulsed inductively-coupled plasma
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference67 articles.
1. Highly Selective and Highly AnisotropicSiO2Etching in Pulse-Time Modulated Electron Cyclotron Resonance Plasma
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3. Study of Threading Dislocations in Wurtzite GaN Films Grown on Sapphire by Metalorganic Chemical Vapor Deposition
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5. Enhancement of the negative ion flux to surfaces from radio‐frequency processing discharges
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