Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
Author:
Funder
Hungarian Fund for Scientific Research (OTKA)
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/24/i=4/a=045013/pdf
Reference41 articles.
1. Plasma Electronics
2. Physics of Radio-Frequency Plasmas
3. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
4. Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors
5. Plasma characteristics of an Ar/CF4/N2discharge in an asymmetric dual frequency reactor: numerical investigation by a PIC/MC model
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