Progress on TSV technology for Medipix3RX chip
Author:
Publisher
IOP Publishing
Subject
Mathematical Physics,Instrumentation
Link
http://stacks.iop.org/1748-0221/12/i=12/a=C12042/pdf
Reference8 articles.
1. TSV last for hybrid pixel detectors: Application to particle physics and imaging experiments
2. Introduction to Microfabrication
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