Author:
Bourdillon Antony J,Boothroyd Chris B
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Computer simulation of diffraction focusing in proximity lithography;SECOND INTERNATIONAL CONFERENCE ON MATERIAL SCIENCE, SMART STRUCTURES AND APPLICATIONS: ICMSS-2019;2019
2. Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-03