Embedded LTPS flash cells with oxide–nitride–oxynitride stack structure for realization of multi-function mobile flat panel displays-Reference-Cited by-同舟云学术

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Embedded LTPS flash cells with oxide–nitride–oxynitride stack structure for realization of multi-function mobile flat panel displays

Published:2008-08-14 Issue:17 Volume:41 Page:172006
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Jung Sungwook,Kim Jaehong,Son Hyukjoo,Jang Kyungsoo,Cho Jaehyun,Kim Kyunghae,Choi Byoungdeog,Yi Junsin

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/41/i=17/a=172006/pdf

Reference8 articles.

1. 27.2: Characterizations of Flash Memory on Glass Using LTPS TFT with an Ultra-Low-Roughness Poly-Si∕SiO[sub 2] Interface

2. MONOS memory in sequential laterally solidified low-temperature poly-Si TFTs

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