The roles of deposition pressure and rf power in opto-electronic properties of a-SiO:H films
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/31/i=14/a=004/pdf
Reference45 articles.
1. Oxygen-bonding environments in glow-discharge-deposited amorphous silicon-hydrogen alloy films
2. High Quality a-SiO:H Films and Their Application to a-Si Solar Cells
3. Film-substrate a-Si solar cells with a new monolithic series-connected structure
4. Wide optical-gap a-SiO:H films prepared by rf glow discharge
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