High Quality a-SiO:H Films and Their Application to a-Si Solar Cells

Abstract

ABSTRACTHydrogenated amorphous silicon oxide (a-SiO:H) films were prepared by rf glow discharge decomposition of SiH4, CO2 and H2 gas mixture. These films showed better properties than a-SiC:H films. By applying the a-SiO:H to the p-layer, we attained an efficiency of 12.5% for 1cm2 single junction solar cells and a total-area efficiency of 10.1% for 30cm × 40cm tandem submodules.