Diagnostics of low-frequency CH4and H2discharge by optical emission spectroscopy
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/22/i=9/a=007/pdf
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4. Effects of frequency on optical emission, electrical, ion, and etching characteristics of a radio frequency chlorine plasma
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