Glow discharge mass spectrometry of silicon DC sputtering in argon-hydrogen
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/14/i=2/a=025/pdf
Reference20 articles.
1. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
2. A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
3. PLASMA DIAGNOSTICS OF AN rf‐SPUTTERING GLOW DISCHARGE
4. A Study of the Neutral Species rf Sputtered from Oxide Targets
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