Pressure dependences of electron energy distribution and power dissipation in symmetrical RF helium discharges
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/27/i=7/a=018/pdf
Reference25 articles.
1. Mechanisms for Power Deposition in Ar/SiH4 Capacitively Coupled RF Discharges
2. Transition between different regimes of rf glow discharges
3. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
4. Ion Bombardment Secondaty Electron Maintenance of Steady RF Discharge
5. Investigation of an Enhanced Glow Structure in a Low-Pressure rf Discharge in Helium
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Development of high-efficiency capacitive discharge using magnetic resonance wireless power transfer systems;Plasma Sources Science and Technology;2021-05-01
2. Detailed comparison between probe density measurements of glow discharge in argon and in helium;Journal of Quantitative Spectroscopy and Radiative Transfer;2006-01
3. Gap Length Dependence of Electron Energy Distribution in Low-Pressure Ar Capacitively Coupled RF Discharges;Japanese Journal of Applied Physics;2000-03-15
4. Characterization of helium/argon working gas systems in a radiofrequency glow discharge atomic emission source. Part II: Langmuir probe and emission intensity studies for Al, Cu and Macor samples;Spectrochimica Acta Part B: Atomic Spectroscopy;1998-07
5. Effects of nonlocal electron kinetics and transition from α to γ regime in an RF capacitive discharge in nitrogen;IEEE Transactions on Plasma Science;1998-04
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3