Effective ionization coefficients and electron drift velocities in gas mixtures of SF6with He, Xe, CO2and N2from Boltzmann analysis
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/35/i=23/a=307/pdf
Reference29 articles.
1. Plasma diagnostics of a SF6radiofrequency discharge used for the etching of silicon
2. Atmospheric sulfur hexafluoride: Sources, sinks and greenhouse warming
3. Insulating gases
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