The effect of the magnetic field strength on the sheath region of a dc magnetron discharge
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/41/i=20/a=202007/pdf
Reference24 articles.
1. Application of the Child-Langmuir law to magnetron discharge plasmas
2. Measurements of the cathode sheath in a magnetron sputtering discharge using laser induced fluorescence
3. Axial distribution of optical emission in a planar magnetron discharge
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4. Structure of DC magnetron sputtering discharge at various gas pressures: a two-dimensional particle-in-cell Monte Carlo collision study;Plasma Sources Science and Technology;2021-05-01
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