Comparison of 1D and 2D particle-in-cell simulations for DC magnetron sputtering discharges-Reference-Cited by-同舟云学术

Comparison of 1D and 2D particle-in-cell simulations for DC magnetron sputtering discharges

Author:

Zheng Bocong¹^ORCID,Fu Yangyang²³^ORCID,Wang Keliang¹^ORCID,Tran Thanh¹,Schuelke Thomas¹³^ORCID,Fan Qi Hua¹³⁴^ORCID

Affiliation:

1. Fraunhofer Center for Coatings and Diamond Technologies, Michigan State University, East Lansing, Michigan 48824, USA

2. Department of Computational Mathematics, Science and Engineering, Michigan State University, East Lansing, Michigan 48824, USA

3. Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA

4. Department of Chemical Engineering and Materials Science, Michigan State University, East Lansing, Michigan 48824, USA

Funder

National Science Foundation

Air Force Office of Scientific Research

U.S. Department of Energy Plasma Science Center

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

Reference64 articles.

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