Axial distribution of optical emission in a planar magnetron discharge-Reference-Cited by-同舟云学术

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Axial distribution of optical emission in a planar magnetron discharge

Published:1988-09 Issue:5 Volume:6 Page:2960-2964
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Gu Lan,Lieberman M. A.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.575460

Cited by 75 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Scale-invariant breathing oscillations and transition of the electron energization mechanism in magnetized discharges;Applied Physics Letters;2024-05-06

2. Two-dimensional analytical description of the plasma potential in a magnetron discharge;Scientific Reports;2023-09-23

3. STUDY OF LOW-PRESSURE DISCHARGE BY OPTICAL EMISSION SPECTROSCOPY;Problems of Atomic Science and Technology;2020-12-11

4. Physics and technology of magnetron sputtering discharges;Plasma Sources Science and Technology;2020-11-01

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