Synchrotron area diffractometry as a tool for spatial high-resolution three-dimensional lattice misorientation mapping-Reference-Cited by-同舟云学术

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Synchrotron area diffractometry as a tool for spatial high-resolution three-dimensional lattice misorientation mapping

Published:2003-04-22 Issue:10A Volume:36 Page:A74-A78
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Mikul k P,L bbert D,Koryt r D,Pernot P,Baumbach T

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/36/i=10A/a=315/pdf

Reference6 articles.

1. Study of residual strains in wafer crystals by means of lattice tilt mapping

2. Reciprocal space mapping for semiconductor substrates and device heterostructures

3. μm-resolved high resolution X-ray diffraction imaging for semiconductor quality control

4. Combined x-ray imaging and diffraction study of light-induced distortions in Fe:LiNbO3

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