Swarm data of O−, NO−, He+, N2O+, and ions in N2O, He and N2O–He mixtures for PECVD applications
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/40/i=6/a=023/pdf
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4. Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3using a Monte Carlo‐fluid hybrid model
5. On Certain Approximate Solutions of Lineae Differential Equations of the Second Order*
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