Ion-beam-induced thin film stress in lithium niobate
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference40 articles.
1. Microfabrication in LiNbO3 by ion‐bombardment‐enhanced etching
2. Ion beam enhanced etching of LiNbO3
3. Ultrathin membranes in x-cut lithium niobate
4. Mechanical properties of thin films
5. Stress and plastic flow in silicon during amorphization by ion bombardment
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1. Raman characterization of focused ion beam fabricated lithium niobate film;Journal of Applied Physics;2024-01-17
2. Helium Ion‐Assisted Wet Etching of Silicon Carbide with Extremely Low Roughness for High‐Quality Nanofabrication;Small Methods;2024-01-07
3. Defects and mechanical properties in weakly damaged Si ion implanted GaAs;Physical Review B;2019-06-24
4. Investigation of Li/Nb-sublattices in ion implanted LiNbO3 by RBS and NRA in channelling configuration;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-10
5. Direction-dependent RBS channelling studies in ion implanted LiNbO3;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2016-07
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