Simulation of a diamond-shaped target with different sizes in plasma based ion implantation
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/33/i=20/a=317/pdf
Reference20 articles.
1. Overview of plasma source ion implantation research at University of Wisconsin–Madison
2. Comparison between conventional and plasma source ion‐implanted femoral knee components
3. Ion beam assisted coating and surface modification with plasma source ion implantation
4. A comparative study of beam ion implantation, plasma ion implantation and nitriding of AISI 304 stainless steel
5. Interaction between the plasma and the workpiece surface in the process of plasma source ion implantation
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1. Treatment homogeneity and conformal analysis of plasma based ion implanted 3D target;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-04
2. Modelling and experiment of plasma-based ion-implanted two-dimensional target;Modelling and Simulation in Materials Science and Engineering;2004-01-07
3. Measured and calculated retained dose with different process parameters in plasma based ion implantation;Surface and Coatings Technology;2003-08
4. Effect of plasma density on the distribution of incident ions and depth profile in plasma-based ion implanted layers;Applied Surface Science;2003-02
5. Simulation of the distribution of incident ions and depth profile in plasma-based ion implanted layers with different pulse width;Modelling and Simulation in Materials Science and Engineering;2002-10-28
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