Beam chopper for subnanosecond pulses in scanning electron microscopy
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/11/i=6/a=010/pdf
Reference11 articles.
1. Deflection beam-chopping in the SEM
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1. High-Speed Techniques;Electron Beam Testing Technology;1993
2. High repetition rate electron beam chopping system for electron beam testing at microwave frequencies;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1990-11
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4. Picosecond photoelectron microscope for high-speed testing of integrated circuits;IBM Journal of Research and Development;1990-03
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