Deflection beam-chopping in the SEM
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/10/i=3/a=014/pdf
Reference8 articles.
1. Probing Gunn domains at X-band microwave frequencies using a scanning microscope
2. High Speed Beam Deflection and Blanking for Electron Lithography
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