Determination of doping and mobility profiles by automatic electrical measurements and anodic stripping
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/20/i=5/a=013/pdf
Reference10 articles.
1. An automated system for the controlled stripping of thin silicon layers
2. Technique used in Hall effect analysis of ion implanted Si and Ge
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