Preparation of hydrogenated microcrystalline silicon films with hot-wire-assisted MWECR-CVD system
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1009-1963/15/4/035/pdf
Reference25 articles.
1. Light-induced metastable defects in hydrogenated amorphous silicon: A systematic study
2. The hydrogen collision model: theory and experiment
3. Hydrogen in silicon
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1. Spectroscopic Ellipsometry Analysis of Amorphous Silicon Thin Films for Si-Nanocrystals;Journal of Nanoscience and Nanotechnology;2012-04-01
2. Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputtering;Acta Physica Sinica;2012
3. The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅰ)——Physical model and theoretical methods;Acta Physica Sinica;2006
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