The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅰ)——Physical model and theoretical methods
-
Published:2006
Issue:11
Volume:55
Page:5930
-
ISSN:1000-3290
-
Container-title:Acta Physica Sinica
-
language:
-
Short-container-title:Acta Phys. Sin.
Author:
Jin Xiao-Lin ,Yang Zhong-Hai ,
Abstract
We present a theoretical and computational model to study the ionization of the electron cyclotron resonance (ECR) microwave discharge using a quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision method. The interaction between the charged particles and microwave fields are described by particle-in-cell method. The collision processes are treated with Monte Carlo method. Elastic, excitational, and ionizing electron-neutral collisions and elastic, charge exchange ion-neutral collisions are included. The cross sections are the functions of particle’s energy. The theoretical part of simulation is introduced in detaid as foundation of the numerical simulation.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献