Highly accurate positioning control method for piezoelectric actuators based on phase-shifting optoelectronics
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
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2. Self-Aligning and Self-Calibrating Capacitive Sensor System for Displacement Measurement in Inaccessible Industrial Environments;IEEE Transactions on Instrumentation and Measurement;2018-02
3. Green laser interferometric metrology system with sub-nanometer periodic nonlinearity;Applied Optics;2016-04-08
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