Determination of the pore size distribution and porosity of porous low-dielectric-constant films by grazing incidence x-ray scattering
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference14 articles.
1. Properties of nanoporous silica thin films determined by high-resolution x-ray reflectivity and small-angle neutron scattering
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3. Determination of pore size distribution in thin films by ellipsometric porosimetry
4. Porosity characterization by beam-based three-photon positron annihilation spectroscopy
5. Pore Characteristics of Low-Dielectric-Constant Films Grown by Plasma-Enhanced Chemical Vapor Deposition Studied by Positron Annihilation Lifetime Spectroscopy
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