Modeling and prototyping of a fiber Bragg grating-based dynamic micro-coordinate measuring machine probe-Reference-Cited by-同舟云学术

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Modeling and prototyping of a fiber Bragg grating-based dynamic micro-coordinate measuring machine probe

Published:2016-01-13 Issue:2 Volume:27 Page:025016
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Liu Fangfang,Chen Lijuan,Wang Jingfan,Xia Haojie,Li Ruijun,Yu Liandong,Fei Yetai

Funder

Project 111

National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/27/i=2/a=025016/pdf

Reference21 articles.

1. Probing systems for dimensional micro- and nano-metrology

2. Development of a Silicon-based Nanoprobe System for 3-D Measurements

3. A high precision micro/nano CMM using piezoresistive tactile probes

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2. Development of a High-Resolution Touch Trigger Probe Based on an Optical Lever for Measuring Micro Components;IEEE Sensors Journal;2022-04-01

3. Development of measurement system for microstructures using an optical fiber probe: improvement of measurable region and depth;Measurement Science and Technology;2020-05-05

4. Development and characterization of a high-sensitivity fiber Bragg grating-based vibrating nano-probe for 3D measurement;Sensor Review;2019-03-07

5. Design and Verification of Micro/Nano-Probes for Coordinate Measuring Machines;Nanomanufacturing and Metrology;2018-11-20

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