Development of a High-Resolution Touch Trigger Probe Based on an Optical Lever for Measuring Micro Components-Reference-Cited by-同舟云学术

Development of a High-Resolution Touch Trigger Probe Based on an Optical Lever for Measuring Micro Components

Published:2022-04-01 Issue:7 Volume:22 Page:6466-6475
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Feng Xiao-Yu¹,Xu Peng¹^ORCID,Li Rui-Jun¹^ORCID,Lei Ying-Jun¹^ORCID,Zhang Lian-Sheng¹^ORCID,Wang Biao¹,Huang Qiang-Xian¹^ORCID

Affiliation:

1. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9745626/09723054.pdf?arnumber=9723054

Reference34 articles.

1. Development of a low-cost and vibration-free constant-temperature chamber for precision measurement;feng;Sens Mater,2015

2. Development of a Micro/Nano Probing System Using Double Elastic Mechanisms

3. A new micro/nano-touch-trigger probe using an optoelectronic sensor with a wedge prism

4. Development of a High-Precision Touch-Trigger Probe Using a Single Sensor

5. Ultrastable and highly sensitive eddy current displacement sensor using self-temperature compensation

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe;IEEE Transactions on Instrumentation and Measurement;2024

2. Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm;IEEE Transactions on Instrumentation and Measurement;2024

3. Measurement of micropore by resonant probe with microsphere;AIP Advances;2023-11-01

4. Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Features—A Review;Metrology;2023-04-17

5. High-precision detection method for an object edge based on a position-sensitive detector;Applied Optics;2023-02-23